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IEC 60050-521-2002 国际电工词汇.第521部分:半导体器件和集成电路

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【英文标准名称】:InternationalElectrotechnicalVocabulary-Part521:Semiconductordevicesandintegratedcircuits
【原文标准名称】:国际电工词汇.第521部分:半导体器件和集成电路
【标准号】:IEC60050-521-2002
【标准状态】:现行
【国别】:国际
【发布日期】:2002-05
【实施或试行日期】:
【发布单位】:国际电工委员会(IX-IEC)
【起草单位】:IEC/TC1
【标准类型】:()
【标准水平】:()
【中文主题词】:半导体器件;定义;定义;电子设备及元件;词汇;术语;电气工程;电子工程;集成电路
【英文主题词】:Definitions;Electricalengineering;Electronicengineering;Electronicequipmentandcomponents;Integratedcircuits;Semiconductordevices;Terminology;Vocabulary
【摘要】:ThispartofIEC60050givesthegeneralterminologyusedinthefieldsofsemiconductortechnologyandsemiconductordesignandfortypesofsemiconductors.ThisterminologyisofcourseconsistentwiththeterminologydevelopedintheotherspecializedpartsoftheIEV.
【中国标准分类号】:L56;L40
【国际标准分类号】:01_040_31;31_080_01;31_200
【页数】:210P.;A4
【正文语种】:英语


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【英文标准名称】:StandardTestMethodforMeasuringPackageandSealIntegrityUsingHeliumastheTracerGas
【原文标准名称】:使用氦作为示踪气体测量包装和密封完整性的标准试验方法
【标准号】:ASTMF2391-2005
【标准状态】:现行
【国别】:
【发布日期】:2005
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F02.40
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:
【英文主题词】:blisterpackaging;bottles;cartridges;flexiblepackaging;gasbarrierperformance;heliumleaktest;impermeablepackaging(andmaterials);integritymonitoring;massspectrometer;massspectrometerleaktest;massspectrometersensor;pass/failcriteri
【摘要】:Thevacuum,bubbletestmethod,asdescribedinTestMethodD3078,andvariousotherleakdetectionmethodsdescribedelsewhere(TestMethodD4991,GuideE432,GuideE479,TestMethodE493,TestMethodE498,TestMethodE499,andTestMethodE1603)havebeensuccessfullyusedwidelyinvariousindustriesandapplicationstodeterminethatagivenpackageisorisnotax201C;leaker.x201D;Thesensitivityofanyselectedleaktestmethodhastobeconsideredtodetermineitsapplicabilitytoaspecificsituation.Theprocedurespresentedinthistestmethodallowtheusertocarryoutpackageandsealintegritytestingwithsufficientsensitivitytoquantifysealsinthepreviouslydefinedmoderatetoveryfinesealranges.Byemployingseal-isolatingleaktestingfixtures,packagesconstructedofvariousmaterialscanbetestedinthefullrangeofsealperformancerequirements.Designofthesefixturesisbeyondthescopeofthismethod.Theseseal/packageintegritytestprocedurescanbeutilizedas:5.4.1Adesigntool,5.4.2Fortoolingqualification,5.4.3Processsetup,5.4.4Processvalidationtool,5.4.5Qualityassurancemonitoring,or5.4.6Researchanddevelopment.1.1Thistestmethodincludesseveralproceduresthatcanbeusedforthemeasurementofoverallpackageandsealbarrierperformanceofavarietyofpackagetypesandpackageforms,aswellasseal/closuretypes.Thebasicelementsofthismethodinclude:1.1.1Helium(employedastracergas),1.1.2Heliumleakdetector(massspectrometer),and1.1.3Package/product-specifictestfixtures.1.1.4Mostapplicationsofheliumleakdetectionaredestructive,inthatheliumneedstobeinjectedintothepackageafterthepackagehasbeensealed.Theinjectionsitethenneedstobesealed/patchedexternally,whichoftendestroysitssaleability.Alternatively,ifheliumcanbeincorporatedintotheheadspacebeforesealing,themethodcanbenon-destructivebecauseallthatneedstobeaccomplishedistosimplydetectforheliumescapingthesealedpackage.1.2Twoproceduresaredescribed;howeverthesupportingdatainSection14onlyreflectsProcedureB(VacuumMode).Thealternative,SnifferMode,hasproventobeavaluableprocedureformanyapplications,butmayhavemorevariabilityduetoexactlythemannerthattheoperatorconductsthetestsuchaswhetherthepackageissqueezed,effectofmultiplesmallleakscomparedtofewerlargeleaks,backgroundheliumconcentration,packagepermeabilityandspeedatwhichthescanisconducted.Furthertestingtoquantifythisproceduresvariabilityisanticipated,butnotincludedinthisversion.1.2.1ProcedureA:SnifferMode8212;thepackageisscannedexternallyforheliumescapingintotheatmosphereorfixture.1.2.2ProcedureB:VacuumMode8212;theheliumcontainingpackageisplacedinaclosedfixture.Afterdrawingavacuum,heliumescapingintotheclosedfixture(capturevolume)isdetected.Typically,thefixturesarecustommadeforthespecificpackageundertest.1.3Thesensitivityofthemethodcanrangefromthedetectionof:1.3.1Largeleaks-10-2Pam3/sto10-5Pam3/s(10-1cc/sec/atmto10-4cc/sec/atm).1.3.2Moderateleaks-10-5Pam3/sto10-7Pam3/s(10-4cc/sec/atmto10-6cc/sec/atm).1.3.3Fineleaks-10-7Pam3